By Rajiv Kohli

ISBN-10: 0323313035

ISBN-13: 9780323313032

As machine sizes within the semiconductor industries are shrinking, they turn into extra liable to smaller contaminant debris, and most traditional cleansing thoughts hired within the usually are not as powerful at smaller scales. The publication sequence advancements in floor illness and cleansing as a complete offers a very good resource of knowledge on those replacement cleansing thoughts in addition to tools for characterization and validation of floor illness. each one quantity has a specific topical concentration, protecting the foremost suggestions and up to date advancements within the region. The chapters during this quantity deal with the assets of floor contaminants and numerous tools for his or her assortment and characterization, in addition to tools for cleanliness validation. Regulatory elements of cleansing also are lined. the gathering of themes during this ebook is exclusive and enhances different volumes during this sequence. Edited by means of the major specialists in small-scale particle floor infection, cleansing and cleansing keep an eye on, those books should be a useful reference for researchers and engineers in R&D, production, qc and procurement specification positioned in a large number of industries akin to: aerospace, automobile, biomedical, safety, strength, production, microelectronics, optics and xerography.

This quantity enhances different volumes during this sequence and:

  • Provides a state of the art survey and best-practice counsel for scientists and engineers engaged in floor cleansing or dealing with the results of floor contamination
  • Addresses the continued developments of shrinking gadget measurement and infection vulnerability in more than a few industries, spearheaded via the semiconductor and others
  • Includes new regulatory aspects

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Extra info for Developments in Surface Contamination and Cleaning - Vol 7: Cleanliness Validation and Verification

Sample text

54] T. Saito, Y. Imada, F. Honda, Chemical influence on wear of Si3N4 and hBN and Si3N4–hBN composites by water lubrication, Wear 247 (2001) 223. V. Nevshupa, E. L. de Segovia, Contamination of vacuum environment due to gas emission stimulated by friction, Tribol. Int. 59 (2013) 23. [56] D. Kinkead, M. Joffe, J. Higley, O. 25 μm High Performance Logic Process, Technology Transfer No. 95052812A-TR, International SEMATECH, Austin, TX, 2005. D. R. F. , ASTM International, West Conshohocken, PA, 2007.

Developments in Surface Contamination and Cleaning. Fundamentals and Applied Aspects, William Andrew Publishing, Norwich, NY, 2008, pp. 299–327. [54] T. Saito, Y. Imada, F. Honda, Chemical influence on wear of Si3N4 and hBN and Si3N4–hBN composites by water lubrication, Wear 247 (2001) 223. V. Nevshupa, E. L. de Segovia, Contamination of vacuum environment due to gas emission stimulated by friction, Tribol. Int. 59 (2013) 23. [56] D. Kinkead, M. Joffe, J. Higley, O. 25 μm High Performance Logic Process, Technology Transfer No.

Wallace, Characterization of organic contaminants outgassed from materials used in semiconductor fabs/processing, in: Proceedings of the 2003 International Conference on Characterization and Metrology for ULSI Technology, 2003, pp. 245–253. [10] T. Fujimoto, K. Takeda, T. Nonaka, Airborne molecular contamination: contamination on substrates and the environment in semiconductors and other industries, in: R. Kohli, K. L. ), Developments in Surface Contamination and Cleaning. Fundamentals and Applied Aspects, William Andrew Publishing, Norwich, NY, 2008, pp.

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Developments in Surface Contamination and Cleaning - Vol 7: Cleanliness Validation and Verification by Rajiv Kohli


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